- Contact Person : Ms. cao pearl
- Company Name : Changzhou Haolilai Photo-Electricity Scientific And Technical Co., Ltd.
- Tel : 86-519-83200028
- Fax : 86-519-83408000
- Address : Jiangsu,Changzhou,Airport Industrial Zone, Luoxi Town, Xinbei District, Changzhou City, Jiangsu Province. China
- Country/Region : China
- Zip : 213136
sapphire wafer for epitaxy
EPI-Ready Polished Saoohire Substrate
Crycal Materials | 99.995% High Purity,2-3Grade Monocrystalline AL2O3 |
Wafer Surface Orientation | C-axis(0001)offset to M(1-100)/A(11-20) 0.2°±0.05° / 0.3°±0.1° / ±0.25° |
Diameter | 50.8mm ± 0.1mm / 76.2mm ± 0.25mm / 100.0 ± 0.40mm / 125.0 ± 0.3mm / 150.0 ± 0.3mm |
Thickness | 330um ± 15um/430um ± 10um/500um ± 10um |
Major Flat | A-axis (1 1-2 0) ± 0.2° |
Major Flat Length | 16.0mm ± 1.0mm / 22.0mm ± 1.0mm / 32.5 ± 1.0mm / 47.5 ± 2.5mm |
Minor | None |
Front Surface Finish | Epi-ready polished, Ra< 0.2nm |
Back Surface | SSP: Fine ground, Ra 0.4 to 1.0 um; DSP: Polished. |
Edge condition | Edge defects not to exceed SEMI M3-91, |
TTV | <15um/<10um/<10um |
BOW | <15um/<10um/<10um |
Warp | <15um/<10um/<10um |
Bubble & Color | None by visual inspection in intensive light |
Ground Boundary | None by visual inspection in fluorescent light |
Cleanliness | Free visible contamination |
Packaging | Packaged in a class 100 clean room environment, in cassettes of 25pcs or single fluroware, under a nitrogen atmosphere. |
Note | R-plane (1-1 0 2), A-plane (1 1-2 0 ), and M-plane(1-1 0 0) are available; Customer's specification not listed above is also available upon request. |
sapphire wafer for epitaxy
